Chemical Engineering April 2020 - 45

When reliable
FIGURE 4. For the manufacture of semiconductors, impurities are closely
monitored, with emphasis on total organic carbon (TOC), silica, metals and
other particles
important to have the correct level of purity for consistent
and accurate results.
A variety of treatment technologies are applicable for
healthcare and research applications, including softening,
carbon pre-treatment, reverse osmosis, deionization,
UV and ultrafiltration. It is vital that water quality
is consistently monitored to ensure that standards are
met and to prevent any risks to research, testing or
equipment that could impact patient care.
Microelectronics
High-purity water is used in a variety of applications for
microelectronics, from circuits and microchips (Figure
4) to light-emitting diodes (LEDs), photovoltaic (PV)
cells for solar panels, silicon wafers and semiconductors.
Manufacturing semiconductors is a very complex
process involving a myriad of chemicals and specialty
gases. In simplistic terms, silicon wafers undergo multiple
steps to build the transistors and circuit paths on
the wafers. Each step requires high-purity chemicals
and gases to create the layers and ultrapure water to
rinse. Water-quality standards in these processes typically
follow ASTM E-1.1, E-1.2 and SEMI C63 specification
requirements with an emphasis on TOC, silica,
metals (including boron) and particulate matter.
The ultrapure water (UPW) system is usually made
up of three major subsystems to achieve the required
water quality: makeup, primary and polish. A typical
UPW setup is shown in Figure 5.
Makeup. The makeup system provides pretreatment,
which is designed to remove the majority of contaminants
from a municipal water supply. Here, greater than
99% removal of anions, metals, silica, TOC and particles
is achieved using unit operations of media filtration,
carbon filter or chemical feed, advanced oxidation
processes (AOP), water softening and reverse osmosis
(single or double pass). This equipment typically operCHEMICAL
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Chemical Engineering April 2020

Table of Contents for the Digital Edition of Chemical Engineering April 2020

Contents
Chemical Engineering April 2020 - Cover1
Chemical Engineering April 2020 - Cover2
Chemical Engineering April 2020 - Contents
Chemical Engineering April 2020 - 2
Chemical Engineering April 2020 - 3
Chemical Engineering April 2020 - 4
Chemical Engineering April 2020 - 5
Chemical Engineering April 2020 - 6
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Chemical Engineering April 2020 - Cover3
Chemical Engineering April 2020 - Cover4
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