Chemical Engineering January 2017 - 47

Acids
Acetic
Hydrofluoric
Nitric
Phosphoric
Sulfuric
Bases
TABLE 2. EXAMPLES OF ELECTRONICS CHEMICALS
Solvents
Ammonium hydroxide
Hydrochloric Potassium hydroxide
Sodium hydroxide
1,2-Ethylenediamine
Acetone
Cyclohexanone
Ethylene glycol
Hexamethyldisilazine
Isopropanol dilutes
Methylethylketone
Methanol
n-Butyl acetate
N-Methylpyrrolidone
Negative resist developer
PBR
Propylene glycol
Methyl ester acetate
Xylene
als, copper-plating chemicals, and
precursor materials for low-k and
high-k dielectrics. The low-k and
high-k of the latter referring to the
low and high dielectric constant, k,
inherent in such materials.
Examples of specific chemicals
electronics industry
used
in
the
can be found in Table 2. In order to
be acceptable for use in the electronics
chemicals industry, these
chemicals are sometimes required
to go through redundant purification
steps using processes such as distillation,
ion exchange, gas adsorption
and filtration.
Just as liquid chemicals need to
meet the high-purity demands required
by the electronics industry,
so too do the gases used in the
manufacture of electronics. Table 3
represents a sampling of the types of
gases that are typically used in the
electronics industry.
Perspective
Performance
Acetic Copper Clean
Ammonium fluoride
Hydrogen peroxide
Proprietary etching formulations
The semiconductor industry, back in
the early 1970s, was creating chipdesign
pattern etchings, or fabrications,
at the 10 micrometer (μm)
level. In working at such microscopic
levels, the required chemical purity,
while it had to meet a higher-thannormal
standard of purity, was not
a major issue. However, in today's
semiconductor world, they are working
at the 10 nanometer (nm) level.
And by 2021, it is expected that the
semiconductor industry will be working
at the 5-nm level.
The implication here is that any
secondary debris or erroneous particulate
matter entrained in a liquid
or gas at even the 10-nm size coming
in contact with a fabrication can
take a work-piece out of specifications,
making it rejectable. And this
is where the demand for high-purity
chemicals comes from. Creating the
ability and sophistication to manufacture
such components brings with it
the need for other related industries,
such as the chemical industry, to up
Circle 20 on p. 62 or go to adlinks.chemengonline.com/66424-20
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JANUARY 2017
47

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Chemical Engineering January 2017

Table of Contents for the Digital Edition of Chemical Engineering January 2017

Contents
Chemical Engineering January 2017 - Cover1
Chemical Engineering January 2017 - Cover2
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