Modern Pumping Today December 2024 - 31

With the signal processing I BOOST filter software
update, Inficon accelerates the leak rate signal.
for over 1,000 sprays per helium
filling, replaces a remote control
and combines its functions with
those of a manual helium spray gun.
Equipped with an illuminated
color display, it makes
leak detection on complex
semiconductor systems with many
test points and potential leaks
easier. These applications are
characterized by limit leak rates
of less than 1 x 10-9 mbar x l/s. In
these applications, the batteryoperated,
portable device makes
leak testing more flexible, simpler,
and more efficient.
I·BOOST: SHORT
RESPONSE TIME, PRECISE
MEASUREMENT RESULT
With the signal processing filter
I·BOOST software update, Inficon
accelerates the leak rate signal.
This shortens the response and test
times, especially for the UL3000 Fab
and UL6000 Fab series, because
the test points can be sprayed at
shorter intervals. The bottom line is
that this results in a time saving up
to 50 percent in leak detection in
all measuring ranges-a true leap
in efficiency.
Users who purchase the license
achieve faster and more precise
measurement results for different
chamber volumes. The benefits
of I·BOOST are also particularly
effective in complex semiconductor
systems. The lower the limit
leakage rates, the longer the test
cycles usually take-and this is
where the higher sensitivity and
time savings of I·BOOST have the
greatest impact.
WWW.MPTMAG.COM
SPRAY-CHECK: EASY TO
INSTALL TEST LEAK
With the SPRAY-Check, Inficon
offers an easy-to-install test leak.
The tool is based on quartz
windows that are only permeable
to light gases such as helium and
hydrogen. This increases safety and
extends the functionality of leak
detection. SPRAY-Check allows the
measurement set-up and test method
to be checked in the relevant leak
rate range. It can also be attached
directly to the system to carry out
dead-time checks.
Sometimes a certain amount of
time elapses between the spray shot
and the indication on the display. This
allows users to better estimate how
long the pause between spraying
points should last so that potential
leaks can be clearly assigned. The
exclusion procedure applies: If there
is no indication after the dead time
has elapsed, there is no leak.
Because SPRAY-Check is
impermeable to gases that are
harmful to the process, such as
water or oxygen, it can also remain
mounted on the semiconductor
system. Important areas of
application are systems with limit
leakage rates below 10-9 mbar x l/s.
SMART ESSENTIALS
AVAILABLE WORLDWIDE
SMART-Spray, I·BOOST, and SPRAYCheck
are suitable for all mobile
Inficon helium leak detectors of the
UL family, whereby I·BOOST is limited
to the latest generation of UL devices
(UL3000 Fab/UL6000 Fab series).
The UL6000 Fab is the most powerful
and best device on the market
for larger test volumes in modern
semiconductor factories and coating
systems with very large chamber
volumes. It offers the fastest response
times and shortest test times in
all measuring ranges. Its compact
design makes it easy to maneuver
even in tight spaces. The UL3000 Fab
series was also developed for leak
detection in semiconductor factories.
It is characterized by flexibility,
mobility, fast commissioning, and
MPT
high sensitivity. Users also receive
their precise test results very
quickly and are the standard in
modern semiconductor factories.
The UL3000 Fab also requires only a
small footprint and can be easily and
maneuvered through narrow spaces.
The UL1000 Fab series covers a wide
range of applications when it comes
to economical helium vacuum leak
tests in industrial or semiconductor
environments-especially for
smaller chamber volumes. The main
advantages: The device is very
powerful, robust, and inexpensive
to purchase.
With the SPRAY-Check, Inficon offers an easy-toinstall
test leak.
Inficon is a leading provider
of innovative instrumentation,
critical sensor technologies, and
Smart Manufacturing/Industry 4.0
software solutions that enhance
productivity and quality of tools,
processes, and complete factories.
These analysis, measurement, and
control products are essential
for gas leak detection in air
conditioning/refrigeration, and
automotive manufacturing. They are
vital to equipment manufacturers
and end-users in the complex
fabrication of semiconductors
and thin film coatings for optics,
flat panel displays, solar cells,
and industrial vacuum coating
applications. Other users of vacuum
based processes include the life
sciences, research, aerospace,
packaging, heat treatment, laser
cutting, and many other industrial
processes. For more information,
visit www.inficon.com.
DECEMBER 2024 | 31
http://www.inficon.com http://WWW.MPTMAG.COM
Modern Pumping Today December 2024

Table of Contents for the Digital Edition of Modern Pumping Today December 2024
