IEEE Solid-States Circuits Magazine - Fall 2023 - 58
Ann Concannon
Evolution of ESD
Robust IC Design
How ESD design and ESD control have changed our industry
S
ince the invention
of the integrated circuit
(IC) in 1958, advances
in integration
progressed rapidly,
proliferating across industries and
applications. As early as 1970, the
technical community recognized
the threat of electrostatic discharge
(ESD) to the yield and reliability of
the nascent semiconductor industry.
Publications from reliability
conferences from this era linked the
high early life failure rate to the lack
of ESD control in the assembly lines
[1]. Freeman and Beall [1] empirically
verified their hypothesis by testing
good parts with an " equivalent
circuit model for a charged human
body, " producing identical failure
modes with a charging voltage of
1.5-2 kV. Subsequently, they established
a combination of static control
and susceptibility guidelines
for components to mitigate the risk
of ESD damage, defining the concept
of an ESD-controlled area. Interestingly,
before this work, ESD
was not considered damaging if a
human could not feel it strongly-
which occurs at levels higher than
10 kV. One of the first innovations
and patents in ESD protection (U.S.
Patent 3,648,127) was granted to
Digital Object Identifier 10.1109/MSSC.2023.3298872
Date of current version: 14 November 2023
58
M. Lenzlinger in 1972 for inventing a
method for engineering breakdown
and dynamic on-resistance for gate
protection devices and experimentally
demonstrating better gate oxide
protection against simulated
static events. Since 1972, there have
been more than 100,000 U.S. patents
issued in the ESD domain.
FALL 2023
IEEE SOLID-STATE CIRCUITS MAGAZINE
" Recognizing the Need Is The
Primary Condition for Design. "
-Charles Eames
Today, ESD protection is an important
part of every IC and is required
to meet the minimum ESD protection
levels for handling in manufacturing
areas without damage. Globally,
in 2022, the total silicon dedicated
1943-0582/23©2023IEEE
OPENING ART WAS CREATED BY THE AUTHOR
https://orcid.org/0009-0009-7996-696X
IEEE Solid-States Circuits Magazine - Fall 2023
Table of Contents for the Digital Edition of IEEE Solid-States Circuits Magazine - Fall 2023
Contents
IEEE Solid-States Circuits Magazine - Fall 2023 - Cover1
IEEE Solid-States Circuits Magazine - Fall 2023 - Cover2
IEEE Solid-States Circuits Magazine - Fall 2023 - Contents
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