IEEE Robotics & Automation Magazine - June 2023 - 33

systems also share the Hadoop ecosystem. Furthermore, this
can reduce the investments on the infrastructure implementation
of software systems since normal and cheap physical
servers can be used. Besides, a migration path from the current
FDC system to HE-FDCS is presented such that the
migration can be smoothly done without shutting down a
wafer fabrication line. Experiments show that HE-FDCS performs
well under practical manufacturing conditions.
Our future work aims to expand the Hadoop ecosystem to
other software systems, such as APS and real-time dispatching
system. Also, different AI-based methods will be tried for
fault detection and classification of various of manufacturing
tools in the future.
ACKNOWLEDGMENT
This work was supported in part by the Science and Technology
development fund (FDCT), the Macau Special Administrative
Region (file nos. 0018/2021/A1, 0003/2021/ITP, 0083/2021/A2,
0015/2020/AMJ), and by Research Fund of Guangdong-Hong
Kong-Macao Joint Laboratory for Intelligent Micro-Nano
Optoelectronic Technology (No. 2020B1212030010). The
corresponding authors are Yan Qiao and LiPing Bai.
AUTHORS
HuiChu Fu, Institute of Systems Engineering and
Collaborative Laboratory for Intelligent Science and Systems,
Macau University of Science and Technology, Macao
999078, China. Email: huichufu@outlook.com.
Yan Qiao, Institute of Systems Engineering and
Collaborative Laboratory for Intelligent Science and Systems,
Macau University of Science and Technology, Macao
999078, China. Email: yqiao@must.edu.mo.
LiPing Bai, Institute of Systems Engineering and
Collaborative Laboratory for Intelligent Science and Systems,
Macau University of Science and Technology, Macao
999078, China. Email: lipbai@must.edu.mo.
NaiQi Wu, Institute of Systems Engineering and
Collaborative Laboratory for Intelligent Science and Systems,
Macau University of Science and Technology, Macao
999078, China. Email: nqwu@must.edu.mo.
Bin Liu, Zhuhai IKAS Smart Technology Company, Ltd.,
Zhuhai 519000, China. Email: liu.bin@ikasinfo.com.
YunFang He, Institute of Systems Engineering and
Collaborative Laboratory for Intelligent Science and Systems,
Macau University of Science and Technology, Macao
999078, China. Email: heyunfang.sch@gmail.com.
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