Tech Briefs Magazine - May 2022 - PIT-16

TECHNOLOGY LEADERS TopicTECHNOLOGY LEADERS Test & Measurement Systems
searches are useful with top-hat or multipeak
profiles.
Dichotomy Search explores one axis at
a time in large increments until a peak
is identified. Within this peak, another
search cycle is performed using finer
steps to find the peak maximum.
(a)
(b)
(c)
Motion Control Systems
(d)
(e)
(f)
Figure 4. Manual and motorized motion stages: (a) Single fiber, single-end configuration with MKS 562 manual
stages and CONEX-TRA actuators; (b) MKS 8071 4-axis aligner driven by PicomotorTM
piezo actuators; (c) Double-sided
configuration with MKS VP-25 and XMS stages; (d) MKS VP-25XA-XYZL integrated specifically for fiber
alignment; (e) MKS HXP50 hexapod with horizontal and vertical beam paths; (f) MKS MLT-25XYZL/R integrated
direct drive stages designed for fiber alignment.
Different kinds of motion control
systems can be employed in fiber alignment,
ranging from simple manual
stages suitable for small scale and R&D
applications to fully automated production
systems with high precision motorized
stages, pick and place automation,
dispensing and curing systems, machine
vision, etc. The following are representative
of the manual and motorized motion
control systems employed in fiber
TOOL
WORK
CARRIAGE
BASE
BASE
(a) WORLD
Hexapod Trajectory
1.2
1.4
1.6
1.8
2.0
0.8
1.0
0.2
0.4
0.6
(b)
-30
-20
-10
X Motion (mm)
Figure 5. (a). MKS Instruments' HXP hexapod work and tool coordinate systems transformation of axes;
(b) RightPath™ trajectory showing runout.
16
10
20
30
Standard Motion
RightPath™
alignment operations:
* Manual stages are the simplest and the
least costly motion control systems for
precise linear or rotational motion.
They are used in R&D and low volume
production environments. Figure
4(a) shows an MKS ULTRAlignTM
562
manual stage that has been motorized
through the addition of TRA actuators.
* Piezoelectric stages, Figure 4(b), are compact,
four to six axis alignment systems
driven by piezoelectric actuators. They
allow high-resolution (<30 nm) adjustment
for different combinations of X,
Y, Z, θx, θy, and θz and can hold their
position without applied power.
* Linear motor stages with direct read encoder
are the highest precision standard
stages. They have 1 nm MIM
capability when used with precision
motion controllers. MKS Instruments'
XMS linear motor stage, Figure 4(c),
can search within a 10 µm diameter
area of a beam region exhibiting the
highest power.
* XYZ assembly with ball screw drives are
compact stages available with either
a 100 nm or 10 nm MIM and in left
and right versions for single or double-ended
configurations. Figure 4(d)
shows MKS Instruments' 100 nm VP25XA-XYZ.
*
XYZ assembly with direct drive motor, providing
5 nm MIM. Also available in leftand
right-handed configurations.
* Hexapods are mechanical devices that
use six actuators, all moving in parallel,
to provide 6-axis range of motion
Photonics & Imaging Technology, May 2022
PIT Tech Leaders MSK 0522_1.indd 16
Cov
ToC
4/18/22 1:08 PM
Z Motion (mm)
http://info.hotims.com/82321-831
Tech Briefs Magazine - May 2022

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