Tech Briefs Magazine - October 2023 - Comsol-15A

MULTIPHYSICS INNOVATION
SOLIDLY MOUNTED RESONATORS
A type of FBAR, SMRs are
robust and typically have higher
resonance frequencies than
their BAW counterparts. The
acoustic mirror portion of these
devices consists of alternating
layers of materials with high
and low acoustic impedances.
This confines acoustic energy
within the piezoelectric active
layer. SMRs are also being used
as RF filters as well as oscillators,
actuators, and sensors.
The pictured SMR is a
micromachined piezoelectric
MEMS resonator formed on
top of an acoustic mirror on
a thick substrate. In this 2D
model, there are alternating
layers of molybdenum (highimpedance)
and silicon dioxide
(low-impedance) layers, but
actual configuration patterns
can vary. The SMR's alternating
layers add a level of complexity
in the manufacturing process,
and simulation can be used to
optimize the thickness of the
mirror materials to achieve
maximum acoustic reflectivity
and energy confinement.
Simulation can also be
used to see the impact of
manufacturing variability on
device parameters.
As the world transitions
to 5G and anticipates 6G,
design challenges intensify
for both SMRs and FBARs. The
demands for higher operating
frequencies, wider bandwidths,
and high Q factors necessitate
accurate multiphysics
simulations.
LAMB WAVE RESONATORS
The LWR has attracted great
attention because it combines
the advantages of BAW and
SAW resonators. It solves
both the low resonance
frequency limitation and
integration problem that
SAW resonators face and the
multiple frequency capability
problem faced by piezoelectric
BAW resonators. Specifically,
aluminum nitride (AlN) LWRs
feature excellent power
handling capability and high Q
factors.
Informed by AlN's
emergence as the best option
for the transduction of acoustic
waves, we built a multiphysics
model of an AlN LWR. The LWR
remains relatively new on the
scene of RF MEMS devices and
is equally the most complex
and capable of the devices
presented here. In practice, the
actual configuration pattern
can vary, and LWRs may
feature a variety of electrode
configurations to achieve
desired effects.
The complex relationship
between electrode pattern
and device performance makes
for a challenging device to
simulate. Additionally, loss
mechanisms (e.g., anchor
losses) can affect performance,
which needs to be considered.
Multiphysics simulation can
address these needs.
COMSOL NEWS 15a

Tech Briefs Magazine - October 2023

Table of Contents for the Digital Edition of Tech Briefs Magazine - October 2023

Tech Briefs Magazine - October 2023 - Intro
Tech Briefs Magazine - October 2023 - Sponsor
Tech Briefs Magazine - October 2023 - Cov1
Tech Briefs Magazine - October 2023 - Cov2
Tech Briefs Magazine - October 2023 - 1
Tech Briefs Magazine - October 2023 - 2
Tech Briefs Magazine - October 2023 - 3
Tech Briefs Magazine - October 2023 - 4
Tech Briefs Magazine - October 2023 - 5
Tech Briefs Magazine - October 2023 - 6
Tech Briefs Magazine - October 2023 - 7
Tech Briefs Magazine - October 2023 - 8
Tech Briefs Magazine - October 2023 - 9
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Tech Briefs Magazine - October 2023 - 11
Tech Briefs Magazine - October 2023 - 12
Tech Briefs Magazine - October 2023 - 13
Tech Briefs Magazine - October 2023 - 14
Tech Briefs Magazine - October 2023 - 15
Tech Briefs Magazine - October 2023 - 16
Tech Briefs Magazine - October 2023 - 17
Tech Briefs Magazine - October 2023 - 18
Tech Briefs Magazine - October 2023 - 19
Tech Briefs Magazine - October 2023 - 20
Tech Briefs Magazine - October 2023 - 21
Tech Briefs Magazine - October 2023 - 22
Tech Briefs Magazine - October 2023 - 23
Tech Briefs Magazine - October 2023 - 24
Tech Briefs Magazine - October 2023 - 25
Tech Briefs Magazine - October 2023 - 26
Tech Briefs Magazine - October 2023 - Comsol-1A
Tech Briefs Magazine - October 2023 - Comsol-2A
Tech Briefs Magazine - October 2023 - Comsol-3A
Tech Briefs Magazine - October 2023 - Comsol-4A
Tech Briefs Magazine - October 2023 - Comsol-5A
Tech Briefs Magazine - October 2023 - Comsol-6A
Tech Briefs Magazine - October 2023 - Comsol-7A
Tech Briefs Magazine - October 2023 - Comsol-8A
Tech Briefs Magazine - October 2023 - Comsol-9A
Tech Briefs Magazine - October 2023 - Comsol-10A
Tech Briefs Magazine - October 2023 - Comsol-11A
Tech Briefs Magazine - October 2023 - Comsol-12A
Tech Briefs Magazine - October 2023 - Comsol-13A
Tech Briefs Magazine - October 2023 - Comsol-14A
Tech Briefs Magazine - October 2023 - Comsol-15A
Tech Briefs Magazine - October 2023 - Comsol-16A
Tech Briefs Magazine - October 2023 - Comsol-17A
Tech Briefs Magazine - October 2023 - Comsol-18A
Tech Briefs Magazine - October 2023 - Comsol-19A
Tech Briefs Magazine - October 2023 - Comsol-20A
Tech Briefs Magazine - October 2023 - Comsol-21A
Tech Briefs Magazine - October 2023 - Comsol-22A
Tech Briefs Magazine - October 2023 - Comsol-23A
Tech Briefs Magazine - October 2023 - Comsol-24A
Tech Briefs Magazine - October 2023 - Comsol-25A
Tech Briefs Magazine - October 2023 - Comsol-26A
Tech Briefs Magazine - October 2023 - Comsol-27A
Tech Briefs Magazine - October 2023 - Comsol-28A
Tech Briefs Magazine - October 2023 - Comsol-29A
Tech Briefs Magazine - October 2023 - Comsol-30A
Tech Briefs Magazine - October 2023 - Comsol-31A
Tech Briefs Magazine - October 2023 - Comsol-32A
Tech Briefs Magazine - October 2023 - Comsol-33A
Tech Briefs Magazine - October 2023 - Comsol-34A
Tech Briefs Magazine - October 2023 - Comsol-35A
Tech Briefs Magazine - October 2023 - Comsol-36A
Tech Briefs Magazine - October 2023 - 27
Tech Briefs Magazine - October 2023 - 28
Tech Briefs Magazine - October 2023 - 29
Tech Briefs Magazine - October 2023 - 30
Tech Briefs Magazine - October 2023 - 31
Tech Briefs Magazine - October 2023 - 32
Tech Briefs Magazine - October 2023 - 33
Tech Briefs Magazine - October 2023 - 34
Tech Briefs Magazine - October 2023 - 35
Tech Briefs Magazine - October 2023 - 36
Tech Briefs Magazine - October 2023 - 37
Tech Briefs Magazine - October 2023 - 38
Tech Briefs Magazine - October 2023 - 39
Tech Briefs Magazine - October 2023 - 40
Tech Briefs Magazine - October 2023 - 41
Tech Briefs Magazine - October 2023 - 42
Tech Briefs Magazine - October 2023 - 43
Tech Briefs Magazine - October 2023 - 44
Tech Briefs Magazine - October 2023 - 45
Tech Briefs Magazine - October 2023 - 46
Tech Briefs Magazine - October 2023 - 47
Tech Briefs Magazine - October 2023 - 48
Tech Briefs Magazine - October 2023 - 49
Tech Briefs Magazine - October 2023 - 50
Tech Briefs Magazine - October 2023 - 51
Tech Briefs Magazine - October 2023 - 52
Tech Briefs Magazine - October 2023 - Cov3
Tech Briefs Magazine - October 2023 - Cov4
Tech Briefs Magazine - October 2023 - MD-Cov1
Tech Briefs Magazine - October 2023 - MD-Cov2
Tech Briefs Magazine - October 2023 - MD-1
Tech Briefs Magazine - October 2023 - MD-2
Tech Briefs Magazine - October 2023 - MD-3
Tech Briefs Magazine - October 2023 - MD-4
Tech Briefs Magazine - October 2023 - MD-5
Tech Briefs Magazine - October 2023 - MD-6
Tech Briefs Magazine - October 2023 - MD-7
Tech Briefs Magazine - October 2023 - MD-8
Tech Briefs Magazine - October 2023 - MD-8A
Tech Briefs Magazine - October 2023 - MD-8B
Tech Briefs Magazine - October 2023 - MD-8C
Tech Briefs Magazine - October 2023 - MD-8D
Tech Briefs Magazine - October 2023 - MD-9
Tech Briefs Magazine - October 2023 - MD-10
Tech Briefs Magazine - October 2023 - MD-11
Tech Briefs Magazine - October 2023 - MD-12
Tech Briefs Magazine - October 2023 - MD-13
Tech Briefs Magazine - October 2023 - MD-14
Tech Briefs Magazine - October 2023 - MD-15
Tech Briefs Magazine - October 2023 - MD-16
Tech Briefs Magazine - October 2023 - MD-17
Tech Briefs Magazine - October 2023 - MD-18
Tech Briefs Magazine - October 2023 - MD-19
Tech Briefs Magazine - October 2023 - MD-20
Tech Briefs Magazine - October 2023 - MD-21
Tech Briefs Magazine - October 2023 - MD-22
Tech Briefs Magazine - October 2023 - MD-23
Tech Briefs Magazine - October 2023 - MD-24
Tech Briefs Magazine - October 2023 - MD-25
Tech Briefs Magazine - October 2023 - MD-Cov4
Tech Briefs Magazine - October 2023 - Sensor-Cov1
Tech Briefs Magazine - October 2023 - Sensor-Cov2
Tech Briefs Magazine - October 2023 - Sensor-1
Tech Briefs Magazine - October 2023 - Sensor-2
Tech Briefs Magazine - October 2023 - Sensor-3
Tech Briefs Magazine - October 2023 - Sensor-4
Tech Briefs Magazine - October 2023 - Sensor-5
Tech Briefs Magazine - October 2023 - Sensor-6
Tech Briefs Magazine - October 2023 - Sensor-7
Tech Briefs Magazine - October 2023 - Sensor-8
Tech Briefs Magazine - October 2023 - Sensor-9
Tech Briefs Magazine - October 2023 - Sensor-10
Tech Briefs Magazine - October 2023 - Sensor-11
Tech Briefs Magazine - October 2023 - Sensor-12
Tech Briefs Magazine - October 2023 - Sensor-13
Tech Briefs Magazine - October 2023 - Sensor-14
Tech Briefs Magazine - October 2023 - Sensor-15
Tech Briefs Magazine - October 2023 - Sensor-16
Tech Briefs Magazine - October 2023 - Sensor-17
Tech Briefs Magazine - October 2023 - Sensor-18
Tech Briefs Magazine - October 2023 - Sensor-19
Tech Briefs Magazine - October 2023 - Sensor-20
Tech Briefs Magazine - October 2023 - Sensor-21
Tech Briefs Magazine - October 2023 - Sensor-22
Tech Briefs Magazine - October 2023 - Sensor-23
Tech Briefs Magazine - October 2023 - Sensor-24
Tech Briefs Magazine - October 2023 - Sensor-25
Tech Briefs Magazine - October 2023 - Sensor-26
Tech Briefs Magazine - October 2023 - Sensor-27
Tech Briefs Magazine - October 2023 - Sensor-28
Tech Briefs Magazine - October 2023 - Sensor-29
Tech Briefs Magazine - October 2023 - Sensor-30
Tech Briefs Magazine - October 2023 - Sensor-31
Tech Briefs Magazine - October 2023 - Sensor-32
Tech Briefs Magazine - October 2023 - Sensor-Cov3
Tech Briefs Magazine - October 2023 - Sensor-Cov4
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