Tech Briefs Magazine - May 2024 - Sensor-14

TECHNOLOGY LEADERS Sensors
White Light Non-Contact Distance
and Thickness Measurement
L
ight is used in many ways in sensor
technology for high precision applications.
For example, white
light technology can be used for
confocal chromatic sensors and interferometers
that can make extremely precise
and accurate measurements of distance
and thickness down to the sub-nanometer
range. This makes them suitable for
production monitoring in different industries,
including semiconductor fabrication.
However, even though both sensor
types
work
with
white
Resolution
Measuring range
Measurement mode
Measuring rate
Light spot diameter
InterferoMETER
<30 pm
2.1 mm
confocalIDT
3 nm
0.1 mm ... 30 mm
thickness or distance thickness or distance
6 kHz
10 µm
Measurement/tilt angle. 4°
Environment
light
technology, the two measurement methods
differ significantly, although they
complement each other.
Confocal chromatic sensors from Micro-Epsilon
provide sub-micrometer precision
and are used in automation and
production monitoring in dynamic industrial
inline applications. Interferometers
are used in applications that require
nanometer precision in combination
Typical fields of
application
up to 30 kHz
< 3 µm
48°
clean industrial environment, vacuum, clean room
precision
manufacturing, flat
glass, film, and
semiconductor
production
Interferometer vs. confocal chromatic sensor.
with maximum signal stability, which is
required in the semiconductor industry
or precision glass production.
Confocal chromatic systems are the
more flexible solution, at least in terms
of the number of different sensors and
thus the variety of applications. They can
measure either the thickness of transparent
objects or distances on numerous
surfaces. Since Micro-Epsilon's devices
glass and plastics production,
medical technology,
electronics, and semiconductor
production
Detection and measurement
of saw marks
Transplant layers & adhesive
beading
Bow and warp wafers
Wafer thickness measurement/TTV
Recognition and measurement of
bumps on silicone wafers
Inspection of cracks and breakages
Figure 1. Examples of confocal applications. (Image: Micro-Epsilon)
14
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Sensor Technology, May 2024
Measuring the curvature of lenses
Camera auto focus measurement

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Tech Briefs Magazine - May 2024

Table of Contents for the Digital Edition of Tech Briefs Magazine - May 2024

Tech Briefs Magazine - May 2024 - Intro
Tech Briefs Magazine - May 2024 - Sponsor
Tech Briefs Magazine - May 2024 - Cov1
Tech Briefs Magazine - May 2024 - Cov2
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Tech Briefs Magazine - May 2024 - Cov3
Tech Briefs Magazine - May 2024 - Cov4
Tech Briefs Magazine - May 2024 - PIT-Cov1
Tech Briefs Magazine - May 2024 - PIT-Cov2
Tech Briefs Magazine - May 2024 - PIT-1
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Tech Briefs Magazine - May 2024 - PIT-14
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Tech Briefs Magazine - May 2024 - Sensor-Cov1
Tech Briefs Magazine - May 2024 - Sensor-Cov2
Tech Briefs Magazine - May 2024 - Sensor-1
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Tech Briefs Magazine - May 2024 - Sensor-14
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Tech Briefs Magazine - May 2024 - Sensor-18
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Tech Briefs Magazine - May 2024 - Sensor-Cov4
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